Title:
ENCODER DEVICE, DRIVE DEVICE, STAGE DEVICE, ROBOT DEVICE, ROTATION INFORMATION ACQUISITION METHOD, AND ROTATION INFORMATION ACQUISITION PROGRAM
Document Type and Number:
WIPO Patent Application WO/2017/014189
Kind Code:
A1
Abstract:
The encoder device according to the present invention is provided with: a scale having a predetermined pattern, the scale being provided to a rotary shaft of a drive device; a detection unit for detecting the predetermined pattern; a rotation information calculation unit for calculating rotation information of the rotary shaft using the result of detection by the detection unit; an eccentricity information calculation unit; and a correction unit for correcting the rotation information.
More Like This:
| JPH0318717 | INCREMENTAL TYPE ENCODER |
| WO/1996/010752 | ACTIVE MOTION SENSOR |
Inventors:
TAKAHASHI TAIYO (JP)
WATANABE AKIHIRO (JP)
WATANABE AKIHIRO (JP)
Application Number:
PCT/JP2016/071006
Publication Date:
January 26, 2017
Filing Date:
July 15, 2016
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
G01D5/244; B25J19/02; G01D5/347
Domestic Patent References:
| WO2011074103A1 | 2011-06-23 |
Foreign References:
| JP2015105829A | 2015-06-08 | |||
| JP2012002592A | 2012-01-05 |
Attorney, Agent or Firm:
NISHI, Kazuya et al. (JP)
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