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Patent Searching and Data


Title:
ENCODER, DRIVE DEVICE, STAGE DEVICE, AND ROBOT DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/139023
Kind Code:
A1
Abstract:
An encoder provided with a position detection device for detecting position information of moving parts, a magnet having a plurality of polarities along the movement direction of the moving parts, and electrical signal generation parts that have magnetosensitive parts in which magnetic characteristics change due to changes in a magnetic field accompanying relative movements between the electrical signal generation parts and the magnet, and that generate electrical signals on the basis of the magnetic characteristics of the magnetosensitive parts, wherein the magnetosensitive parts are spaced apart from the side of the magnet in the direction orthogonal to the movement direction, and are positioned so that the length direction of the magnetosensitive parts is orthogonal to the tangent direction of at least some of the magnetic lines of the magnet. Thus, the reliability of detection results is improved by minimizing noise caused by unnecessary magnetic fields of the magnet and generating stable electrical signals.

Inventors:
WATANABE AKIHIRO (JP)
Application Number:
PCT/JP2019/000306
Publication Date:
July 18, 2019
Filing Date:
January 09, 2019
Export Citation:
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Assignee:
NIKON CORP (JP)
International Classes:
G01D5/245; B25J19/02; G01D5/244; H02P6/16
Domestic Patent References:
WO2016021074A12016-02-11
WO2017126338A12017-07-27
WO2016010141A12016-01-21
Foreign References:
JPS5576533U1980-05-27
JP2008014799A2008-01-24
Attorney, Agent or Firm:
OMORI Satoshi (JP)
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