Title:
ENCODER
Document Type and Number:
WIPO Patent Application WO/2010/089824
Kind Code:
A1
Abstract:
Disclosed is an encoder equipped with: a light modulation unit that modulates at least a portion of the light emitted from a light source; a moving member that has an incident plane to which multiple light beams of the light are incident, and that can move relatively in at least one direction; and at least two light-receiving units that respectively receive interference bands generated in at least two regions above the moving member. The light is made incident to the moving member in a manner such that at least two interference bands move in opposite directions above the moving member in response to the modulation by means of the light modulation unit.
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Inventors:
MAKINOUCHI SUSUMU (JP)
WATANABE AKIHIRO (JP)
IMAI TORU (JP)
WATANABE AKIHIRO (JP)
IMAI TORU (JP)
Application Number:
PCT/JP2009/006008
Publication Date:
August 12, 2010
Filing Date:
November 11, 2009
Export Citation:
Assignee:
NIKON CORP (JP)
MAKINOUCHI SUSUMU (JP)
WATANABE AKIHIRO (JP)
IMAI TORU (JP)
MAKINOUCHI SUSUMU (JP)
WATANABE AKIHIRO (JP)
IMAI TORU (JP)
International Classes:
G01D5/38
Foreign References:
| JP2006170899A | 2006-06-29 | |||
| JP2007333722A | 2007-12-27 |
Attorney, Agent or Firm:
SHIGA, Masatake et al. (JP)
Masatake Shiga (JP)
Masatake Shiga (JP)
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