Title:
END EFFECTER FOR CARRYING SHEET, CARRIER HAVING THE END EFFECTER, AND SHEET PROCESSING SYSTEM
Document Type and Number:
WIPO Patent Application WO/2003/076141
Kind Code:
A1
Abstract:
An end effecter for carrying a sheet capable of solving such a problem that a cassette is difficult to be carried in since the sheet such as a large glass substrate for liquid crystal display is deflected by its own weight when the sheet is placed horizontally on the fork-shaped end effecter of a robot, wherein sheet support parts are disposed on the end effecter at a plurality of parallel lines, and projected parts with the sheet support parts are provided horizontally on the outermost sides of the end effecter to increase a distance between the parallel lines so as to deflect the sheet to form double raised parts, whereby the amount of the deflection can be reduced.
Inventors:
YOSHIOKA SHINTARO (JP)
Application Number:
PCT/JP2003/002819
Publication Date:
September 18, 2003
Filing Date:
March 10, 2003
Export Citation:
Assignee:
RORZE CORP (JP)
YOSHIOKA SHINTARO (JP)
YOSHIOKA SHINTARO (JP)
International Classes:
H01L21/687; (IPC1-7): B25J15/08
Foreign References:
| JPH09155777A | 1997-06-17 | |||
| JP2001054890A | 2001-02-27 | |||
| JP2001044259A | 2001-02-16 | |||
| JP3073229U | 2000-11-14 | |||
| JP2003062786A | 2003-03-05 | |||
| JPH11106044A | 1999-04-20 | |||
| JP2001274218A | 2001-10-05 |
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