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Title:
END EFFECTOR AND SUBSTRATE TRANSFER ROBOT
Document Type and Number:
WIPO Patent Application WO/2015/098153
Kind Code:
A1
Abstract:
This end effector (700) is provided with: a hand base unit (701) of which at least one part approaches the bottom of a substrate on the bottommost stage or the top of a substrate on the uppermost stage of a plurality of substrates accommodated by a substrate accommodating unit; a substrate holding means (702), which is provided on the hand base unit (701), for supporting two or more substrates including the substrate on the bottommost stage or the substrate on the uppermost stage; and a protrusion changing means (703) for changing the amount of protrusion of the substrate holding means (702) from a standard surface, which includes a surface of the hand base unit (701) facing the substrate on the bottommost stage or the substrate on the uppermost stage. The protrusion changing means (703) has a single drive source (706) that imparts drive force to the entire substrate holding means (702).

Inventors:
HASHIMOTO YASUHIKO (JP)
FUKUSHIMA TAKAYUKI (JP)
KANAMARU RYOSUKE (JP)
KINOSHITA SHINYA (JP)
MIYAGAWA DAIKI 宮川　大&#x
Application Number:
PCT/JP2014/067238
Publication Date:
July 02, 2015
Filing Date:
June 27, 2014
Export Citation:
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Assignee:
KAWASAKI HEAVY IND LTD (JP)
International Classes:
H01L21/677; B25J15/08
Domestic Patent References:
WO2013021645A12013-02-14
Foreign References:
JP2013135099A2013-07-08
JP2003060004A2003-02-28
JP2005161416A2005-06-23
JPH05100199A1993-04-23
JP2010179420A2010-08-19
JP2011091276A2011-05-06
JP2008200837A2008-09-04
JP2001054890A2001-02-27
JP2007109703A2007-04-26
JP2003309166A2003-10-31
JP2925329B21999-07-28
JPH05235147A1993-09-10
JPH11163096A1999-06-18
JP2001118909A2001-04-27
JP2001291759A2001-10-19
JP2005340729A2005-12-08
JPS61152385A1986-07-11
JP2009012088A2009-01-22
JPH0492446A1992-03-25
Other References:
See also references of EP 3089203A4
Attorney, Agent or Firm:
NAZUKA Satoshi et al. (JP)
Noted mound 聡 (JP)
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