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Title:
ENERGY BEAM IRRADIATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/210239
Kind Code:
A1
Abstract:
This energy beam irradiation device comprises: an electron discharge unit having an elongated electron discharge part; a housing having a window part that emits an energy beam based on electrons discharged from the electron discharge part; and a unit accommodation part that can accommodate the electron discharge unit. A plurality of positioning parts, which slidably abut the outer surface of the electron discharge unit or the inner surface of the unit accommodation part and perform positioning of the electron discharge part with respect to the unit accommodation part, are provided between the outer surface of the electron discharge unit and the inner surface of the unit accommodation part.

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Inventors:
HARAGUCHI DAI (JP)
Application Number:
PCT/JP2021/003091
Publication Date:
October 21, 2021
Filing Date:
January 28, 2021
Export Citation:
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Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
H01J35/00; G21K5/00; G21K5/02; G21K5/04; H01J35/06; H01J35/08; H01J35/18; H05G1/00
Foreign References:
JP2003149398A2003-05-21
JP2009162577A2009-07-23
JP2013098090A2013-05-20
JP2003149398A2003-05-21
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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