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Patent Searching and Data


Title:
ENHANCED FIB-SEM SYSTEMS FOR LARGE-VOLUME 3D IMAGING
Document Type and Number:
WIPO Patent Application WO/2018/140903
Kind Code:
A3
Abstract:
A microscopy system for imaging a sample (102) includes a scanning electron microscope system (120) configured for imaging a surface layer of the sample and a focused ion beam system (140) configured for generating an ion beam for milling the surface layer away from a sample after it has been imaged. A movable mechanical shutter (116) is configured to be moved automatically into a position between the sample and the scanning electron microscope system, so that when the electron beam is not imaging the sample the movable mechanical shutter is positioned between the sample and the scanning electron microscope system.

Inventors:
XU, C., Shan (Janelia Research Campus, 19700 Helix DriveAshburn, VA, 20147, US)
HAYWORTH, Kenneth, J. (Janelia Research Campus, 19700 Helix DriveAshburn, VA, 20147, US)
HESS, Harald, F. (Janelia Research Campus, 19700 Helix DriveAshburn, VA, 20147, US)
Application Number:
US2018/015798
Publication Date:
September 20, 2018
Filing Date:
January 29, 2018
Export Citation:
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Assignee:
HOWARD HUGHES MEDICAL INSTITUTE (Janelia Research Campus, 19700 Helix DriveAshburn, VA, 20147, US)
International Classes:
H01J37/02; H01J37/28
Foreign References:
US8642958B22014-02-04
JPH05314941A1993-11-26
JP2015185457A2015-10-22
US5986264A1999-11-16
US20040031936A12004-02-19
Attorney, Agent or Firm:
BELLERMANN, Mark R.W. et al. (Brake Hughes Bellermann LLP, c/o Cpa Global900 2nd Ave South, Suite 60, Minneapolis MN, 55402, US)
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