Title:
ENVIRONMENTAL MONITORING SYSTEM
Document Type and Number:
WIPO Patent Application WO/2022/057383
Kind Code:
A1
Abstract:
Embodiments of the present application provide an environmental monitoring system, used for monitoring the concentration of air contaminants in process areas of a dust-free room, and comprising: a plurality of process areas provided in the dust-free room; a sampling device used for collecting an environmental sample in each process area; a control device used for controlling the sampling device to collect an environmental sample in the preset process area; and an analysis device in communication with the sampling device and used for analyzing the collected environmental sample. According to the present application, analysis data of the environmental sample in a specific process area can be quickly obtained, and the accuracy of data analysis is improved.
Inventors:
DING YUNXIAO (CN)
Application Number:
PCT/CN2021/103771
Publication Date:
March 24, 2022
Filing Date:
June 30, 2021
Export Citation:
Assignee:
CHANGXIN MEMORY TECH INC (CN)
International Classes:
G01N33/00; G01N1/24
Foreign References:
| TW200416930A | 2004-09-01 | |||
| CN1218906A | 1999-06-09 | |||
| US20100283620A1 | 2010-11-11 | |||
| CN103093166A | 2013-05-08 | |||
| CN110361466A | 2019-10-22 | |||
| CN108352345A | 2018-07-31 | |||
| CN203490109U | 2014-03-19 |
Attorney, Agent or Firm:
BEIJING LINKAW PATENT ATTORNEY LAW FIRM (CN)
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