Title:
EPITAXIAL WAFER AND SWITCH ELEMENT AND LIGHT-EMITTING ELEMENT USING SAME
Document Type and Number:
WIPO Patent Application WO/2014/084550
Kind Code:
A1
Abstract:
An epitaxial wafer comprises an epitaxial layer disposed on a substrate. The epitaxial layer comprises a first semiconductor layer disposed on the substrate and a second semiconductor layer disposed on the first semiconductor layer and having a thickness that is thicker than that of the first semiconductor layer. A surface defect density of the second semiconductor layer is 0.1/cm2 or less.
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Inventors:
KANG SEOK MIN (KR)
KIM JI HYE (KR)
BAE HEUNG TEAK (KR)
KIM JI HYE (KR)
BAE HEUNG TEAK (KR)
Application Number:
PCT/KR2013/010646
Publication Date:
June 05, 2014
Filing Date:
November 21, 2013
Export Citation:
Assignee:
LG INNOTEK CO LTD (KR)
International Classes:
H01L21/20
Foreign References:
US20100119849A1 | 2010-05-13 | |||
KR20110116203A | 2011-10-25 | |||
KR20070035078A | 2007-03-29 | |||
KR20120004214A | 2012-01-12 | |||
US20060105559A1 | 2006-05-18 |
Attorney, Agent or Firm:
SEO, Kyo Jun (KR)
서교준 (KR)
서교준 (KR)
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