Title:
EQUAL-PATH INTERFEROMETER
Document Type and Number:
WIPO Patent Application WO/2010/148277
Kind Code:
A3
Abstract:
An optical assembly for use in an interferometer is provided. The optical assembly includes first and second partially reflective surfaces positioned along an optical axis and oriented at different non-normal angles to the optical axis. The second partially reflective surface is configured to receive light transmitted through the first partially reflective surface along the optical path, transmit a portion of the received light to a test object to define measurement light for the interferometer and reflect another portion of the received light back towards the first partially reflective surface to define reference light for the interferometer. The reference light makes at least one round trip path between the second and first partially reflective surfaces.
Inventors:
DE GROOT PETER J (US)
DECK LESLIE L (US)
BIEGEN JAMES F (US)
KOLIOPOULOS CHRIS (US)
DECK LESLIE L (US)
BIEGEN JAMES F (US)
KOLIOPOULOS CHRIS (US)
Application Number:
PCT/US2010/039125
Publication Date:
April 21, 2011
Filing Date:
June 18, 2010
Export Citation:
Assignee:
ZYGO CORP (US)
DE GROOT PETER J (US)
DECK LESLIE L (US)
BIEGEN JAMES F (US)
KOLIOPOULOS CHRIS (US)
DE GROOT PETER J (US)
DECK LESLIE L (US)
BIEGEN JAMES F (US)
KOLIOPOULOS CHRIS (US)
International Classes:
G01B9/02; G01B9/04; G01B11/00; G01N21/45; G02B21/00; G02B26/00
Foreign References:
| US20060158659A1 | 2006-07-20 | |||
| US6195168B1 | 2001-02-27 | |||
| US20080304075A1 | 2008-12-11 | |||
| US20080094630A1 | 2008-04-24 | |||
| US20050259265A1 | 2005-11-24 |
Other References:
See also references of EP 2454554A4
Attorney, Agent or Firm:
WEFERS, Marc, M. et al. (P.O. Box 1022Minneapolis, Minnesota, US)
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