Title:
ESD PROTECTIVE ELEMENT
Document Type and Number:
WIPO Patent Application WO/2019/202774
Kind Code:
A1
Abstract:
This ESD protective element (10) comprises: a semiconductor substrate (20); a wiring layer (30); and an inductor conductor (40). A Zener diode is formed on the semiconductor substrate (20). The inductor conductor (40) is formed on the wiring layer (30), and is a 2-dimensional spiral shape. The inductor conductor (40) has a connection conductor part (410) near the connection part of a first inductor conductor (41) and a second inductor conductor (42), and connects in sequence the first inductor conductor (41) and the second inductor conductor (42) facing from the outer circumference edge to the inner circumference edge. The width of the second inductor conductor (42) is smaller than the width of the first inductor conductor (41).
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Inventors:
UEKI NORIYUKI (JP)
Application Number:
PCT/JP2018/045431
Publication Date:
October 24, 2019
Filing Date:
December 11, 2018
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H01L21/822; H01F17/00; H01F27/29; H01L21/3205; H01L21/329; H01L21/768; H01L21/8234; H01L23/522; H01L27/04; H01L27/06; H01L29/861; H01L29/866; H01L29/868
Domestic Patent References:
| WO2018008422A1 | 2018-01-11 | |||
| WO2017159282A1 | 2017-09-21 | |||
| WO2012036207A1 | 2012-03-22 |
Foreign References:
| JP2005101097A | 2005-04-14 | |||
| JP2009272360A | 2009-11-19 | |||
| JPH07272136A | 1995-10-20 | |||
| JP2013522955A | 2013-06-13 |
Attorney, Agent or Firm:
KAEDE PATENT ATTORNEYS' OFFICE (JP)
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