Title:
ESD TEST INSPECTION DEVICE AND ESD TEST INSPECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2013/150732
Kind Code:
A1
Abstract:
[Problem] To perform an ESD test inspection quickly and accurately in an ESD test during a high-voltage conformance inspection and a high voltage energization inspection. [Solution] An ESD test inspection device (1) is provided with an ESD tester (10) for performing an ESD application test to inspect ESD resistance in one or a plurality of devices to be tested, and a diagnostic circuit (5) for diagnosing conformance of an ESD application voltage waveform. The diagnostic circuit (5) has: a series circuit, in which a variable resistor (2) and a partial resistor (3) are connected between high-voltage output terminals (probes 11) of the ESD tester (10); and an LED (4) for confirming light emission, the LED (4) being a light-emitting means connected between both ends of the partial resistor (3).
Inventors:
UCHIDA REN (JP)
SAKAGUCHI HIDEAKI (JP)
SAKAGUCHI HIDEAKI (JP)
Application Number:
PCT/JP2013/001848
Publication Date:
October 10, 2013
Filing Date:
March 18, 2013
Export Citation:
Assignee:
SHARP KK (JP)
International Classes:
G01R31/30; G01R31/26; H01L21/66
Foreign References:
| JP2011191260A | 2011-09-29 |
Attorney, Agent or Firm:
YAMAMOTO, Shusaku et al. (JP)
Shusaku Yamamoto (JP)
Shusaku Yamamoto (JP)
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