Title:
EUV-LIGHT GENERATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2015/063825
Kind Code:
A1
Abstract:
This EUV-light generation device, which allows efficient target retrieval, may be provided with the following: a chamber in which EUV light is generated when a target inside said chamber is exposed to laser light; a target-feeding unit that feeds a target into the chamber; and a target-retrieving unit whereby a target that was fed into the chamber by the target-feeding unit but was not exposed to the aforementioned laser light is received on a receiving surface that contacts said target at an angle greater than 90° and is retrieved into a retrieval container.
Inventors:
IWAMOTO FUMIO (JP)
SHIRAISHI YUTAKA (JP)
HORI TSUKASA (JP)
ISHII TAKUYA (JP)
SHIRAISHI YUTAKA (JP)
HORI TSUKASA (JP)
ISHII TAKUYA (JP)
Application Number:
PCT/JP2013/079092
Publication Date:
May 07, 2015
Filing Date:
October 28, 2013
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
H01L21/027; G03F7/20; H05G2/00
Domestic Patent References:
| WO2010112048A1 | 2010-10-07 |
Foreign References:
| JP2008078031A | 2008-04-03 | |||
| JP2013084892A | 2013-05-09 | |||
| JP2012523666A | 2012-10-04 | |||
| JP2013131483A | 2013-07-04 | |||
| JP2012212654A | 2012-11-01 | |||
| JP2011514648A | 2011-05-06 | |||
| JP2010212685A | 2010-09-24 | |||
| JP2009218323A | 2009-09-24 |
Attorney, Agent or Firm:
EBISU International Patent Office (JP)
Patent business corporation エビス international patent firm (JP)
Patent business corporation エビス international patent firm (JP)
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