EUV LIGHT SOURCE DEVICE AND METHOD FOR GENERATING EUV LIGHT

WIPO Patent Application WO/2016/043318

A1

　Provided is a light source device and a method with which the efficiency of generating EUV light can be further improved. [Solution] According to this EUV light source device, a noble gas is supplied into a space inside a hollow body 2 comprising a non-magnetic insulator that extends so as to penetrate a cavity resonator 1 through a space inside the cavity resonator 1. The space inside a first chamber C1, interposed between the lower end part of the hollow body 2 and the space inside a second chamber C2, is vacuum-suctioned. At least a part of a partition wall C20 between the first chamber C1 and the second chamber C2 is configured from a transmissive window M comprising an EUV-light-transmissive material. Electromagnetic waves are supplied into the space inside the cavity resonator 1 and a standing wave is formed, the energy of the standing wave being absorbed by the noble gas present in the space inside the hollow body 2. A plasma is thereby generated, and the EUV light emitted from the plasma is radiated through the lower end part of the hollow body 2 and the transmissive window M into the space inside the second chamber C2.

ONISHI MASAMI (JP)
WAHEED HUGRASS (AU)
TASHIMA SAYA (JP)

PCT/JP2015/076716

March 24, 2016

September 18, 2015

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SCHOOL CORP KANSAI UNIV (JP)

H05G2/00; H01L21/027

JP2012079857A	2012-04-19
JP2009032776A	2009-02-12
JP2012018820A	2012-01-26

SATO & ASSOCIATES (JP)
Patent business corporation creation international patent firm (JP)

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