Title:
EUV PELLICLE STRUCTURE AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2017/131358
Kind Code:
A1
Abstract:
Provided is a method for manufacturing an extreme ultraviolet (EUV) pellicle structure, comprising the steps of: preparing a pellicle membrane comprising an intermediate layer structure in which a plurality of EUV transmission layers and heat-releasing layers are alternately stacked, a first thin film on the upper surface of the intermediate membrane structure, and a second thin film disposed on the lower surface of the intermediate membrane structure and having a thermal radiation rate lower than that of the first thin film; and disposing a cooling structure which absorbs heat from the pellicle membrane on an exposed edge sidewall of the heat-releasing layers of the pellicle membrane.
Inventors:
AHN JINHO (KR)
KIM JUNGHWAN (KR)
KIM JUNGSIK (KR)
WOO DONGGON (KR)
JANG YONGJU (KR)
KIM JUNGHWAN (KR)
KIM JUNGSIK (KR)
WOO DONGGON (KR)
JANG YONGJU (KR)
Application Number:
PCT/KR2017/000263
Publication Date:
August 03, 2017
Filing Date:
January 09, 2017
Export Citation:
Assignee:
IUCF-HYU(INDUSTRY-UNIVERSITY COOP FOUND HANYANG UNIVERSITY) (KR)
International Classes:
G03F1/62; G03F1/00; G03F1/22; G03F7/20; H01L21/027
Foreign References:
| US20140370423A1 | 2014-12-18 | |||
| KR20150145256A | 2015-12-29 | |||
| US20050048376A1 | 2005-03-03 | |||
| US20050045262A1 | 2005-03-03 | |||
| US20060146313A1 | 2006-07-06 | |||
| JPH02302757A | 1990-12-14 |
Attorney, Agent or Firm:
PARK, Sangyoul (KR)
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