Title:
EUV TRANSMISSIVE FILM
Document Type and Number:
WIPO Patent Application WO/2023/067739
Kind Code:
A1
Abstract:
Provided is an EUV transmissive film exhibiting both durability in low-pressure hydrogen atmosphere environments and a high practical level of EUV transmittance. The EUV transmissive film is equipped with a main layer that is formed from a metallic beryllium, and a protective layer that covers at least one side of the main layer and is formed from beryllium nitride.
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Inventors:
KASHIWAYA TOSHIKATSU (JP)
KONDO ATSUO (JP)
CHAEN HIROKI (JP)
TANIMURA TAKASHI (JP)
KONDO ATSUO (JP)
CHAEN HIROKI (JP)
TANIMURA TAKASHI (JP)
Application Number:
PCT/JP2021/038811
Publication Date:
April 27, 2023
Filing Date:
October 20, 2021
Export Citation:
Assignee:
NGK INSULATORS LTD (JP)
International Classes:
G03F1/62
Foreign References:
| JP2017522590A | 2017-08-10 | |||
| JP2018151622A | 2018-09-27 | |||
| JP2000338299A | 2000-12-08 | |||
| JPH10340843A | 1998-12-22 | |||
| JPH01162332A | 1989-06-26 | |||
| JPH0558817B2 | 1993-08-27 | |||
| JP2018194840A | 2018-12-06 |
Attorney, Agent or Firm:
TAKAMURA Masaharu et al. (JP)
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