Title:
EUV TRANSMISSIVE FILM
Document Type and Number:
WIPO Patent Application WO/2023/067957
Kind Code:
A1
Abstract:
Provided is an EUV transmissive film exhibiting not only EUV transmittance but also high IR emissivity. This EUV transmissive film has an EUV transmittance of at least 80% at a wavelength of 13.5nm, and comprises a main layer that has an IR emissivity of at least 2.0% at a wavelength of 2μm, and a protective layer that covers at least one side of the main layer and has an IR transmittance of at least 70% at a wavelength of 2μm.
Inventors:
KASHIWAYA TOSHIKATSU (JP)
KONDO ATSUO (JP)
CHAEN HIROKI (JP)
TANIMURA TAKASHI (JP)
GORIKI NAOKI (JP)
KONDO ATSUO (JP)
CHAEN HIROKI (JP)
TANIMURA TAKASHI (JP)
GORIKI NAOKI (JP)
Application Number:
PCT/JP2022/034590
Publication Date:
April 27, 2023
Filing Date:
September 15, 2022
Export Citation:
Assignee:
NGK INSULATORS LTD (JP)
International Classes:
G03F1/62
Domestic Patent References:
| WO2020078721A1 | 2020-04-23 |
Foreign References:
| JP2017522590A | 2017-08-10 | |||
| JP2009271262A | 2009-11-19 | |||
| JP2001221689A | 2001-08-17 | |||
| JPH0558817B2 | 1993-08-27 | |||
| JP2018194840A | 2018-12-06 | |||
| JP2017522590A | 2017-08-10 |
Attorney, Agent or Firm:
TAKAMURA Masaharu et al. (JP)
Download PDF:
Previous Patent: CARBONATION TREATMENT DEVICE AND CARBONATION TREATMENT METHOD
Next Patent: ELECTROMAGNETIC RELAY
Next Patent: ELECTROMAGNETIC RELAY