Title:
EVACUATION APPARATUS CONTROL METHOD AND EVACUATION APPARATUS CONTROL APPARATUS
Document Type and Number:
WIPO Patent Application WO/2012/074099
Kind Code:
A1
Abstract:
[Problem] To provide an evacuation apparatus control method and an evacuation apparatus control apparatus capable of wide-range pressure control even when the flow rate of gas is changed in a wide range.
[Solution] A method for controlling a plurality of evacuation apparatuses (A to D) provided in a vacuum apparatus (50) comprises: a setting step for setting a linked or non-linked state of the plurality of evacuation apparatuses (A to D) such that the number of the evacuation apparatuses that are controlled in a linked manner is decreased and the number of the evacuation apparatuses that are controlled in a non-linked manner is increased as the flow rate of gas introduced into the vacuum apparatus (50) is decreased; and an evacuating step for evacuating the vacuum apparatus (50) by using at least one of the plurality of evacuation apparatuses (A to D) in the set state.
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| JPH07158562 | CRYOPUMP |
| JPS59160868 | [Title of the device] Vacuum tank |
Inventors:
NISHIMURA MASARU (JP)
Application Number:
PCT/JP2011/077928
Publication Date:
June 07, 2012
Filing Date:
December 02, 2011
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
NISHIMURA MASARU (JP)
NISHIMURA MASARU (JP)
International Classes:
F04B37/16; F04B49/06; F04D19/04; F04D27/00; H01L21/02
Foreign References:
| JP2001059497A | 2001-03-06 | |||
| JPH0180682U | 1989-05-30 |
Attorney, Agent or Firm:
HAGIWARA, Yasushi et al. (JP)
Yasushi Hagiwara (JP)
Yasushi Hagiwara (JP)
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Claims:
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