Title:
EVACUATION DEVICE, VACUUM PROCESSING DEVICE, AND EVACUATION METHOD
Document Type and Number:
WIPO Patent Application WO/2012/086767
Kind Code:
A1
Abstract:
In the present invention, when a failure occurs in a first vacuum pump (53), a control means (66) controls the opening and closing of a gate valve (58), an on-off valve (59), a first inlet on-off valve (61), and a second inlet on-off valve (62). Thus, the vacuum status of a first vacuum processing chamber (51) is maintained using a second vacuum pump (55a), and the vacuum status of a second vacuum processing chamber (52) is maintained using a second vacuum pump (55b).
Inventors:
HASHIMOTO KENJI (JP)
YAMAMOTO MASAHIRO (JP)
INOUE TOSHIYA (JP)
YAMAMOTO MASAHIRO (JP)
INOUE TOSHIYA (JP)
Application Number:
PCT/JP2011/079846
Publication Date:
June 28, 2012
Filing Date:
December 22, 2011
Export Citation:
Assignee:
ULVAC INC (JP)
HASHIMOTO KENJI (JP)
YAMAMOTO MASAHIRO (JP)
INOUE TOSHIYA (JP)
HASHIMOTO KENJI (JP)
YAMAMOTO MASAHIRO (JP)
INOUE TOSHIYA (JP)
International Classes:
F04B37/16; H01L21/205; H01L21/3065; C23C14/00
Foreign References:
| JP2003083248A | 2003-03-19 | |||
| JP2004218648A | 2004-08-05 | |||
| JP2010167338A | 2010-08-05 |
Attorney, Agent or Firm:
KURIHARA, Hiroyuki et al. (JP)
Hiroyuki Kurihara (JP)
Hiroyuki Kurihara (JP)
Download PDF:
Claims: