Title:
EVALUATION OF CHAMBER COMPONENTS HAVING TEXTURED COATINGS CHAMBER COMPONENTS
Document Type and Number:
WIPO Patent Application WO2003083160
Kind Code:
A3
Abstract:
A component for a substrate processing chamber comprises a structure having a textured coating with surface grains. The component is evaluated by directing a beam of electrons onto the textured coating of the component to cause at least some of the electrons to be backscattered. The backscattered electrons are detected and a signal image is generated. The component is selected when the signal image exhibits surface grains sized from about 0.1 to about 5 micron. In one version, the component is also selected when the grains are substantially flower shaped.
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Inventors:
LIN SHYH-NUNG
MENZIE MARK D
SUN NIMOAL
MENZIE MARK D
SUN NIMOAL
Application Number:
PCT/US2003/009430
Publication Date:
February 05, 2004
Filing Date:
March 26, 2003
Export Citation:
Assignee:
APPLIED MATERIALS INC (US)
International Classes:
C23C4/12; C23C14/00; C23C14/56; C23C16/44; G01B15/08; G01B15/04; G01N23/20; G01N23/203; H05H1/46; (IPC1-7): H01J37/32; C23C14/56; C23C16/44; G01N23/203; C23C4/00
Domestic Patent References:
| WO2001048260A1 | 2001-07-05 |
Foreign References:
| EP1158072A2 | 2001-11-28 | |||
| EP0845545A1 | 1998-06-03 | |||
| US4732792A | 1988-03-22 |
Other References:
ROSENBERG R W: "Increasing PVD tool uptime and particle control with twin-wire-arc spray coatings", MICRO, MARCH 2001, CANON COMMUNICATIONS, USA, vol. 19, no. 3, pages 103 - 105, 108, 110 - 111, XP002255938, ISSN: 1081-0595, Retrieved from the Internet [retrieved on 20030929]
DAY A P ET AL: "A comparison of grain imaging and measurement using horizontal orientation and colour orientation contrast imaging, electron backscatter pattern and optical methods", 5TH WORKSHOP ON ELECTRON BACK-SCATTER DIFFRACTION, OXFORD, UK, APRIL 1998, vol. 195, pt.3, Journal of Microscopy, Sept. 1999, Blackwell Science, UK, pages 186 - 196, XP002255939, ISSN: 0022-2720
DAY A P ET AL: "A comparison of grain imaging and measurement using horizontal orientation and colour orientation contrast imaging, electron backscatter pattern and optical methods", 5TH WORKSHOP ON ELECTRON BACK-SCATTER DIFFRACTION, OXFORD, UK, APRIL 1998, vol. 195, pt.3, Journal of Microscopy, Sept. 1999, Blackwell Science, UK, pages 186 - 196, XP002255939, ISSN: 0022-2720
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