Title:
EVAPORATION MASK PLATE, SHEATHING EVAPORATION MASK PLATE, EVAPORATION SYSTEM AND ALIGNMENT TESTING METHOD
Document Type and Number:
WIPO Patent Application WO/2018/223695
Kind Code:
A1
Abstract:
Disclosed are an evaporation mask plate (200), a sheathing evaporation mask plate, an evaporation system and an alignment testing method. The evaporation mask plate (200) comprises a mask pattern plate (1). The mask pattern plate (1) comprises an evaporation region (4) and a testing region (6) located at the periphery of the evaporation region (4). The testing region (6) is provided with at least two sets of testing unit groups (10), the two sets of testing unit groups (10) are located in different regions of the testing region (6), and each of the testing unit groups (10) comprises at least one testing hole (11) for alignment.
Inventors:
DING WEIWEI (CN)
WU JIANPENG (CN)
WU JIANPENG (CN)
Application Number:
PCT/CN2018/071549
Publication Date:
December 13, 2018
Filing Date:
January 05, 2018
Export Citation:
Assignee:
BOE TECHNOLOGY GROUP CO LTD (CN)
CHENGDU BOE OPTOELECT TECH CO (CN)
CHENGDU BOE OPTOELECT TECH CO (CN)
International Classes:
C23C14/04
Foreign References:
| CN206015074U | 2017-03-15 | |||
| CN204803392U | 2015-11-25 | |||
| CN104808434A | 2015-07-29 | |||
| CN105803389A | 2016-07-27 | |||
| CN205844737U | 2016-12-28 | |||
| US20030221614A1 | 2003-12-04 |
Other References:
See also references of EP 3636797A4
Attorney, Agent or Firm:
DRAGON INTELLECTUAL PROPERTY LAW FIRM (CN)
Download PDF: