Title:
EVAPORATION RAW MATERIAL CONTAINER
Document Type and Number:
WIPO Patent Application WO/2019/216206
Kind Code:
A1
Abstract:
Provided is an evaporation raw material container having excellent thermal conductivity and corrosion resistance. An evaporation raw material container 100 provided with a sealable container body 10 having a heat-conductive container wall, and a gas lead-out port 12 for leading an evaporation raw material in the container body 10 to the outside of the container body 10, the container wall 20 having a base material wall comprising aluminum or an aluminum alloy, and a barrier-type anodic oxide film provided on the inner surface of the base material wall.
Inventors:
MIZUTANI FUMIKAZU (JP)
WATANUKI YASUHIRO (JP)
WATANUKI YASUHIRO (JP)
Application Number:
PCT/JP2019/017251
Publication Date:
November 14, 2019
Filing Date:
April 23, 2019
Export Citation:
Assignee:
KOJUNDO CHEMICAL LABORATORY CO LTD (JP)
International Classes:
C23C16/448; H01L21/31
Domestic Patent References:
| WO2005088185A1 | 2005-09-22 |
Foreign References:
| JP2018506859A | 2018-03-08 | |||
| JP2016513185A | 2016-05-12 | |||
| JP2016000866A | 2016-01-07 |
Attorney, Agent or Firm:
WATANABE Kazuhira (JP)
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