Title:
EVAPORATION SOURCE DEVICE AND EVAPORATION COATING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2018/149219
Kind Code:
A1
Abstract:
Disclosed is an evaporation source device (200), comprising: a support frame (207), and a nozzle set (202) and a shell (204) both located on the support frame (207), wherein the shell (204) comprises an evaporation opening (206) such that an evaporation material sprayed from the nozzle set (202) passes through the evaporation opening (206). Further disclosed is an evaporation coating apparatus (300).
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Inventors:
LI JIAN (CN)
Application Number:
PCT/CN2017/116533
Publication Date:
August 23, 2018
Filing Date:
December 15, 2017
Export Citation:
Assignee:
BOE TECHNOLOGY GROUP CO LTD (CN)
ORDOS YUANSHENG OPTOELECTRONICS CO LTD (CN)
ORDOS YUANSHENG OPTOELECTRONICS CO LTD (CN)
International Classes:
C23C14/24; C23C14/54
Foreign References:
| CN206438173U | 2017-08-25 | |||
| CN102286727A | 2011-12-21 | |||
| CN101838790A | 2010-09-22 | |||
| CN205368487U | 2016-07-06 | |||
| CN204125524U | 2015-01-28 |
Attorney, Agent or Firm:
LIU, SHEN & ASSOCIATES (CN)
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