Title:
EXAMINATION DEVICE, EXAMINATION METHOD, COMPUTER PROGRAM, AND RECORDING MEDIUM
Document Type and Number:
WIPO Patent Application WO/2018/066361
Kind Code:
A1
Abstract:
This examination device 100 is provided with: an irradiation unit 110 which irradiates a sample S having a plurality of layers L with terahertz waves THz; a detection unit 130 which detects the terahertz waves from the sample and acquires a detection waveform DW; an estimation unit 1523 which estimates the positions of boundary surfaces B1, B2 by comparing, with a library 1522a indicating estimation waveforms EW of terahertz waves, a waveform section in the detection waveform, said waveform section being included in a comparison range WR; and an adjustment unit 1521 which adjusts the comparison range.
Inventors:
OCHIAI TAKANORI (JP)
Application Number:
PCT/JP2017/033949
Publication Date:
April 12, 2018
Filing Date:
September 20, 2017
Export Citation:
Assignee:
PIONEER CORP (JP)
International Classes:
G01B11/00; G01B11/06; G01B15/02; G01N21/3586
Domestic Patent References:
| WO2016132452A1 | 2016-08-25 | |||
| WO2010137173A1 | 2010-12-02 | |||
| WO2016138935A1 | 2016-09-09 |
Attorney, Agent or Firm:
EGAMI, Tatsuo et al. (JP)
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