Title:
EXAMINATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/198201
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide an examination device that can detect defects with good sensitivity, even in a case where the intensity of scattered light reflected from an examination body differs greatly at each location on the examination body. This examination device uses detection signal history to predict whether the next detection signal level will exceed a threshold. If it was predicted that the next detection signal level will exceed the threshold, device operation is changed in advance so that the threshold is not exceeded.
Inventors:
SAITO SHOTA (JP)
Application Number:
PCT/JP2018/015401
Publication Date:
October 17, 2019
Filing Date:
April 12, 2018
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
G01B11/30; G01N21/88; G01N21/956; H01L21/66
Domestic Patent References:
| WO2012090392A1 | 2012-07-05 |
Foreign References:
| JP2013164357A | 2013-08-22 | |||
| JP2015206817A | 2015-11-19 | |||
| JP2013029438A | 2013-02-07 | |||
| JPS62198738A | 1987-09-02 |
Attorney, Agent or Firm:
HIRAKI & ASSOCIATES (JP)
Download PDF:
Previous Patent: LEARNING IMAGE GENERATION DEVICE, LEARNING IMAGE GENERATION METHOD AND PROGRAM
Next Patent: INDOOR UNIT FOR AIR CONDITIONER
Next Patent: INDOOR UNIT FOR AIR CONDITIONER