Title:
EXCIMER LAMP AND EXCIMER LAMP DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/270062
Kind Code:
A1
Abstract:
Provided are an excimer lamp and an excimer lamp device that have uniform illuminance on an irradiated surface in the longitudinal direction of the excimer lamp, even if the excimer lamp is elongated. This excimer lamp comprises: a discharge container that has a substantially square shape, the cross-sectional shape of which is flat, and that has a pair of flat walls extending in the longitudinal direction, and a pair of side walls connecting the flat walls; a pair of external electrodes disposed facing each other on the respective outer surfaces of the pair of flat walls; a first internal electrode that is disposed inside the discharge container so as to extend toward the inner surface of the pair of flat walls; and a second internal electrode disposed inside the discharge container at a position separated in the longitudinal direction from the first internal electrode, so as to extend toward the inner surface of the pair of flat walls, wherein the first internal electrode and the second internal electrode are each provided at a position between the ends of the external electrodes and the center in the longitudinal direction.
Inventors:
HORIBE HIROKI (JP)
Application Number:
PCT/JP2022/013025
Publication Date:
December 29, 2022
Filing Date:
March 22, 2022
Export Citation:
Assignee:
USHIO ELECTRIC INC (JP)
International Classes:
H01J65/00; H01J61/54
Foreign References:
| JP2012176341A | 2012-09-13 | |||
| JPH11273629A | 1999-10-08 | |||
| JP2000077033A | 2000-03-14 | |||
| JP2008034272A | 2008-02-14 | |||
| JP5376410B2 | 2013-12-25 |
Attorney, Agent or Firm:
UNIUS PATENT ATTORNEYS OFFICE (JP)
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