Title:
EXCIMER LAMP AND METHOD FOR PRODUCING SAME
Document Type and Number:
WIPO Patent Application WO/2015/049606
Kind Code:
A1
Abstract:
Provided is an excimer lamp that prevents damage to an inner tube caused by the difference in thermal expansion coefficient between an inner electrode and the inner tube. The excimer lamp (10) is equipped with: a luminescent tube (20) which has a bottomed cylindrical inner tube (50), and an outer tube (40) forming a sealed discharge space (60) together with the inner tube (50), and comprises a dielectric with a discharge gas enclosed in the discharge space (60); an outer electrode (30) which is disposed on the outer peripheral surface side of the outer tube (40) of the luminescent tube (20); and an inner electrode (31) which is inserted into the inner tube (50). With the excimer lamp (10), stress exerted on the inner tube (50) by the inner electrode (31) when the inner electrode (31) thermally expands due to dielectric barrier discharge between the inner peripheral surface of the inner tube (50) and the outer peripheral surface of the inner electrode (31) is suppressed, and a buffer space (70) having a cross-sectional area which ensures dielectric barrier discharge in the discharge space (60) is formed taking into consideration the size of the discharge space (60) and the size of the discharge voltage.
Inventors:
YAJIMA HIDEKI (JP)
KOBAYASHI GO (JP)
SERIZAWA IZUMI (JP)
HONDA TOMOHIKO (JP)
KOBAYASHI GO (JP)
SERIZAWA IZUMI (JP)
HONDA TOMOHIKO (JP)
Application Number:
PCT/IB2014/064412
Publication Date:
April 09, 2015
Filing Date:
September 11, 2014
Export Citation:
Assignee:
ORC MFG CO LTD (JP)
International Classes:
H01J65/00
Foreign References:
| JP2003229093A | 2003-08-15 | |||
| JP2010003437A | 2010-01-07 | |||
| JP2013069533A | 2013-04-18 | |||
| JP2011505061A | 2011-02-17 |
Attorney, Agent or Firm:
MIURA, Kunio et al. (JP)
Kunio Miura (JP)
Kunio Miura (JP)
Download PDF: