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Patent Searching and Data


Title:
EXCIMER LASER DEVICE AND ELECTRONIC DEVICE PRODUCTION METHOD
Document Type and Number:
WIPO Patent Application WO/2019/102613
Kind Code:
A1
Abstract:
This excimer laser device comprises: a chamber which contains therein a laser gas and a pair of electrodes and generates pulse-oscillating laser light by means of control of the gas pressure of the laser gas according to a voltage applied between the pair of electrodes; a power source applying the voltage between the pair of electrodes; and a controller which receives as input a target value for the spectral linewidth of the laser light, wherein if the target value changes from a first target value to a second target value, the controller corrects the voltage to be used for the gas pressure control on the basis of a first function having the second target value as a parameter and controls the gas pressure according to the corrected voltage.

Inventors:
ISHIDA KEISUKE (JP)
KOMURO SATOSHI (JP)
FURUSATO HIROSHI (JP)
Application Number:
JP2017/042382
Publication Date:
May 31, 2019
Filing Date:
November 27, 2017
Export Citation:
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Assignee:
GIGAPHOTON INC (Postcode3238558, JP)
International Classes:
H01S3/134; G03F7/20; H01S3/137
Domestic Patent References:
WO2017195244A12017-11-16
WO2017068619A12017-04-27
Foreign References:
JP2017527994A2017-09-21
US20070001127A12007-01-04
JP2003008119A2003-01-10
JP2002223020A2002-08-09
Attorney, Agent or Firm:
HOSAKA, Nobuhisa (Postcode1010025, JP)
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