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Title:
EXCIMER LASER PROCESSING DEVICE AND LASER COLLECTION DEVICE THEREOF
Document Type and Number:
WIPO Patent Application WO/2019/100422
Kind Code:
A1
Abstract:
Disclosed are an excimer laser processing device and a laser collection device thereof. The laser collection device comprises a first mirror (1) arranged on an emission optical path of a laser (L) and away from the laser, a second mirror (2) arranged on the emission optical path of the laser and close to the laser, and a first mirror group (3) arranged outside the emission optical path of the laser. The first mirror receives the light emitted from the laser and reflects the light to the first mirror group, the light reflected from the first mirror group are emitted to the second mirror, the second mirror is inclined in a direction away from the laser, and the light emitted from the first mirror group is reflected to an object (P) surface to be laser-processed. By providing a laser collecting device for collecting the laser not incident on the object surface to be laser-processed, the unused light is collected and re-projected onto the object surface to be laser-processed for secondary use, improving the light utilization rate of the laser and reducing the production cost.

Inventors:
HO WEIMING (CN)
Application Number:
CN2017/113519
Publication Date:
May 31, 2019
Filing Date:
November 29, 2017
Export Citation:
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Assignee:
WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECH CO LTD (430070, CN)
International Classes:
H01S3/00; B23K26/00; H01L21/00; H01S5/00
Foreign References:
CN101185988A2008-05-28
CN103208730A2013-07-17
CN203218701U2013-09-25
CN102244346A2011-11-16
CN101331592A2008-12-24
JP2006013227A2006-01-12
JP2001053021A2001-02-23
Attorney, Agent or Firm:
MING & YUE INTELLECTUAL PROPERTY LAW FIRM (518066, CN)
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