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Patent Searching and Data


Title:
EXCIMER LIGHT SOURCE
Document Type and Number:
WIPO Patent Application WO/2012/050916
Kind Code:
A3
Abstract:
A light source, with electrodes of alternating polarity attached to a substrate in an excimer ultraviolet (UV) lamp, for generating a plasma discharge between each of the electrodes. The shape of the substrate can shape and control the plasma discharge to reduce exposure of materials susceptible to attack by the halogens. The electrodes can be located such that the plasma discharge occurs in a region where it produces less contact of the halogens with the vulnerable areas of the lamp enclosure. The materials, such as the electrodes, substrate, and envelope, can be selected to withstand corrosive materials. In another embodiment, a plurality of sealed tubes, at least some of which contain an excimer gas are positioned between two electrodes.

Inventors:
COOPER JAMES RANDALL (US)
CHAFFEE RONALD W (US)
Application Number:
PCT/US2011/053751
Publication Date:
July 19, 2012
Filing Date:
September 28, 2011
Export Citation:
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Assignee:
ULTRAVIOLET SCIENCES INC (US)
COOPER JAMES RANDALL (US)
CHAFFEE RONALD W (US)
International Classes:
B01J19/08; G01N23/12
Foreign References:
US20090257926A12009-10-15
US20090196801A12009-08-06
US20060163566A12006-07-27
US20110117202A12011-05-19
Other References:
KOGELSCHATZ: "Silent discharges for the generation of ultravioletand vacuum ultraviolet excimer radiation.", PURE &APPL. CHEM., vol. 62, no. 9, September 1990 (1990-09-01), pages 1667 - 1674, XP000570258, Retrieved from the Internet
Attorney, Agent or Firm:
ARNO, Thomas, R. (2040 Main Street Fourteenth Floo, Irvine CA, US)
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