Title:
EXCITING UNIT, LINEAR OR PLANAR MOTOR USING THE UNIT, STAGE DEVICE USING THE MOTOR, AND ALIGNER USING THE DEVICE
Document Type and Number:
WIPO Patent Application WO/1999/004481
Kind Code:
A1
Abstract:
A planar motor two-dimensionally movable in a plane which can generate strong thrust, can move a mover in a two-dimensional plane while the motor gives buoyancy to the mover, and can control the position and attitude of the mover in six degrees of freedom. The planar motor is provided with a mover (4) having a magnetic pole unit (14) in which a plurality of permanent magnets (50N and 50S) are arranged in matrix in an X-Y plane, with their magnetic poles being inverted alternately; an iron core having four arm sections (20-26) forming a cross in the X-Y direction as a whole and five projecting teeth (28-36) formed in the base-side section of the core where the arm sections (20-26) cross and in the front end sections of the arm sections (20-26) and disposed so that the teeth (28-36) can be faced to the magnets (50N and 50S) of the unit (14); and an exciting unit (6) having four armature coils (38-44) which are respectively wound around the arm sections (20-26).
Inventors:
TANAKA KEIICHI (JP)
Application Number:
PCT/JP1998/002761
Publication Date:
January 28, 1999
Filing Date:
June 22, 1998
Export Citation:
Assignee:
NIKON CORP (JP)
TANAKA KEIICHI (JP)
TANAKA KEIICHI (JP)
International Classes:
G03F7/20; H02K41/03; H02N15/00; (IPC1-7): H02K41/03
Foreign References:
| JPS6289467A | 1987-04-23 | |||
| JPS6192158A | 1986-05-10 | |||
| JPS4926706A | 1974-03-09 |
Attorney, Agent or Firm:
Morioka, Masaki (Erusion-Ogikubo 16-5, Ogikubo 5-chom, Suginami-ku Tokyo, JP)
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