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Patent Searching and Data


Title:
EXHAUST ACTIVATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/054542
Kind Code:
A1
Abstract:
The present invention relates to a pneumatically controlled exhaust activation device for a semiconductor manufacturing process, wherein the exhaust activation device is formed by coupling an upper body with a lower body, such that the volume of a pneumatic pressure control part is variable according to the degree of coupling between the upper body and the lower body to thus control the pneumatic pressure, and thus it is possible to provide different pneumatic pressures required for different locations in an exhaust duct of semiconductor manufacturing process equipment.

Inventors:
LEE BYOUNG HO (KR)
Application Number:
PCT/KR2017/010376
Publication Date:
March 21, 2019
Filing Date:
September 21, 2017
Export Citation:
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Assignee:
LEE BYOUNG HO (KR)
International Classes:
H01L21/67; B01D53/74
Foreign References:
KR200478718Y12015-11-10
KR101185176B12012-09-24
JPH0960774A1997-03-04
KR20030069301A2003-08-27
KR101160510B12012-06-28
Attorney, Agent or Firm:
YOON, Eui-Seoup (KR)
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