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Patent Searching and Data

Document Type and Number:
WIPO Patent Application WO/2020/261518
Kind Code:
According to the present invention, clogging of an exhaust gas passage from a foreline pipe to a thermal decomposition tower is significantly eliminated. An exhaust gas detoxification unit (U) includes a vacuum pump (1), an exhaust gas introduction nozzle part (20), and an exhaust gas cleaning part (40). The exhaust gas introduction nozzle part (20) includes: an exhaust gas nozzle (21); a protective gas nozzle (25) for forming a protective gas curtain (Gk) which encloses an exhaust gas (H) from the exhaust gas nozzle (21), and a moisture jetting nozzle (27) for enclosing the protective gas curtain (Gk). The exhaust gas cleaning part (40) includes a water tank (41) and a stirring part (46). The water tank (41) is a hollow container in which cleaning water (M) is stored, and is connected to the exhaust gas introduction nozzle part (20). The space between the water (M) of the water tank (41) and the ceiling part (41a) thereof is a flow passage space (45) through which the exhaust gas (H) flows. The stirring part (46) includes: a first bank (47) which is suspended from the ceiling part (41a) of the water tank (41) and of which the lower part is immersed in the water (M) in the water tank (41); and a second bank (48) which is provided downstream of the first bank (47) and of which the upper part is exposed above the water (M).

IKEOKU Tetsuya (30-2, Kotari Ota, Nagaokakyo-sh, Kyoto 33, JP)
Application Number:
Publication Date:
December 30, 2020
Filing Date:
June 27, 2019
Export Citation:
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KANKEN TECHNO CO., LTD. (Kotari Ota Nagaokakyo-sh, Kyoto 33, JP)
BEIJING KANKEN ENVIRONMENTAL PROTECTION EQUIPMENT CO., LTD. (Jia Tai International Bldg. No. 41 East Fourth Ring Middle Road, Chaoyang District, Beijin, 2, CN)
International Classes:
B01D53/78; B01D47/02; B01D47/06; B01D53/75; B01D53/76; B08B3/02; H01L21/02
Attorney, Agent or Firm:
MORI Yoshiaki et al. (Osaka-Ekimae Dai-4 Bldg. 11-4, Umeda 1-chome, Kita-ku, Osaka-sh, Osaka 01, JP)
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