Title:
EXHAUST GAS TREATMENT DEVICE AND SUBSTRATE TREATMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2016/117253
Kind Code:
A1
Abstract:
A technique is provided for reducing the replacement frequency of a filter. This exhaust gas treatment device is provided with a container into which the exhaust gas emitted from a reaction container is introduced, a filter which is provided in the container and which captures reaction byproducts contained in the exhaust gas, and a collision member which collides with the filter and thereby removes from the filter the reaction byproducts captured by the filter.
Inventors:
NUMATA TAKAYUKI (JP)
FUJIKURA HAJIME (JP)
KONNO TAICHIRO (JP)
NEMOTO SHUSEI (JP)
FUJIKURA HAJIME (JP)
KONNO TAICHIRO (JP)
NEMOTO SHUSEI (JP)
Application Number:
PCT/JP2015/085390
Publication Date:
July 28, 2016
Filing Date:
December 17, 2015
Export Citation:
Assignee:
SUMITOMO CHEMICAL CO (JP)
International Classes:
B01D46/24; B01D46/04; C23C16/44; H01L21/205
Foreign References:
| JP2000157820A | 2000-06-13 | |||
| JP2008296137A | 2008-12-11 | |||
| JP2009136731A | 2009-06-25 | |||
| JP2004044968A | 2004-02-12 | |||
| JPH11309322A | 1999-11-09 | |||
| JPS49146576U | 1974-12-18 | |||
| JPS326696B1 | ||||
| JPH1028830A | 1998-02-03 | |||
| JP2001179189A | 2001-07-03 | |||
| JPH10296030A | 1998-11-10 |
Attorney, Agent or Firm:
FUKUOKA Masahiro et al. (JP)
Masahiro Fukuoka (JP)
Masahiro Fukuoka (JP)
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