Title:
EXHAUST LINE TRAP ASSEMBLY OF BORON DOPING DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/052270
Kind Code:
A1
Abstract:
The present invention relates to an exhaust line trap assembly of a boron doping device and, more particularly, to an exhaust line trap assembly of a boron doping device, wherein a sealing member made of Teflon, which has excellent heat resistance, is interposed between an exhaust line made of quartz and a connection tube of a trap, and fumes discharged from the exhaust line undergo gas/liquid separation, thereby increasing purification efficiency. To this end, there is provided an exhaust line trap assembly of a boron doping device, comprising: an exhaust line for discharging hot fumes generated from a process tube of the boron doping device; a trap that is connected to the exhaust line and comprises a connection tube, through which the fumes discharged from the exhaust line are introduced, so as to purify the fumes; a sealing member interposed between the exhaust line and the connection tube so as to form a pipeline through which the exhaust line and the connection tube communicate with each other; and a connection means for compressing and connecting the exhaust line and the connection tube, wherein the exhaust line and the connection tube comprise tight-contact portions having open grooves formed to be open toward each other, respectively, and having diameters larger than the diameters of the exhaust line and of the connection tube, and the sealing member is interposed between the open grooves of the tight-contact portions.
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Inventors:
KIM HYUN HO (KR)
Application Number:
PCT/KR2017/010239
Publication Date:
March 22, 2018
Filing Date:
September 19, 2017
Export Citation:
Assignee:
LEAD ENG CO LTD (KR)
International Classes:
H01L31/18; H01L31/0248; H01L31/06
Foreign References:
| KR20150102384A | 2015-09-07 | |||
| KR20150094535A | 2015-08-19 | |||
| JPH10263357A | 1998-10-06 | |||
| JP2015214746A | 2015-12-03 | |||
| US5443644A | 1995-08-22 |
Attorney, Agent or Firm:
LEE, Un Cheol (KR)
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