Title:
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2010/131490
Kind Code:
A1
Abstract:
One end of a rope (155) is attached to a leg on the −Y side of a frame caster (38), and one end of another rope (155) is attached to a leg on the +Y side of the frame caster. The other end of each rope (155) is: run through a plurality of pulleys (153) affixed to the upper part of a frame (151), one for each rope, said frames being separated from the body of the apparatus; hung in the −Z direction; and attached to a weight (157) that weighs half as much as the amount of weight to be supported. In this case, due to the action of a vibration isolation table (130), even if the body of the apparatus vibrates up or down, or left or right (the normal direction of the pulleys), the weights (157) just move up or down due to rotation of the pulleys (153), and the amount of supported weight of the apparatus does not change. Also, since coil springs are not used, resonance with the body of the apparatus (110) or the vibration isolation table (130) does not occur, and it is possible to improve the damping characteristics of the vibration isolation table (130). Thus, the exposure apparatus can be made larger without causing cost increases.
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Inventors:
AOKI YASUO (JP)
Application Number:
PCT/JP2010/003302
Publication Date:
November 18, 2010
Filing Date:
May 17, 2010
Export Citation:
Assignee:
NIKON CORP (JP)
AOKI YASUO (JP)
AOKI YASUO (JP)
International Classes:
H01L21/027; F16F15/02; F16F15/08; G03F7/20
Foreign References:
| JPS63259492A | 1988-10-26 | |||
| JPH11145041A | 1999-05-28 | |||
| JPH11297613A | 1999-10-29 | |||
| JPH01165116A | 1989-06-29 |
Attorney, Agent or Firm:
TATEISHI, Atsuji (JP)
Tokuji Tateishi (JP)
Tokuji Tateishi (JP)
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Claims: