Title:
EXPOSURE APPARATUS
Document Type and Number:
WIPO Patent Application WO/2013/172163
Kind Code:
A1
Abstract:
This exposure apparatus is configured by including: a transparent substrate (1); an exposure light source (2), which is disposed on the transparent substrate (1), and which emits exposure light (A); a connecting terminal (3), which is disposed by being laminated on the side opposite to the transparent substrate (1) with the exposure light source (2) therebetween; and a drive electrode (4), which electrically connects the exposure light source (2) and the connecting terminal (3) with each other. The exposure light source can be closely disposed on the substrate by disposing, in such a manner, the exposure light source and the connecting terminal on the substrate by laminating the exposure light source and the connecting terminal in the vertical direction with respect to the substrate.
Inventors:
KAJIYAMA KOICHI (JP)
MIZUMURA MICHINOBU (JP)
KANAO MASAYASU (JP)
ISHIKAWA SHIN (JP)
MIZUMURA MICHINOBU (JP)
KANAO MASAYASU (JP)
ISHIKAWA SHIN (JP)
Application Number:
PCT/JP2013/062084
Publication Date:
November 21, 2013
Filing Date:
April 24, 2013
Export Citation:
Assignee:
V TECHNOLOGY CO LTD (JP)
International Classes:
G03F7/20; B41J2/44; B41J2/45; B41J2/455; H01L21/027; H01L33/62; H01L51/50; H01S5/022; H05B33/02; H05B33/06
Domestic Patent References:
| WO2012046715A1 | 2012-04-12 |
Foreign References:
| JP2001356422A | 2001-12-26 | |||
| JP2008227467A | 2008-09-25 | |||
| JP2010274256A | 2010-12-09 | |||
| JP2007212545A | 2007-08-23 | |||
| JP2008132760A | 2008-06-12 | |||
| JP2010186887A | 2010-08-26 |
Attorney, Agent or Firm:
SASAJIMA, Fujio et al. (JP)
Sasajima Wealth 2 male (JP)
Sasajima Wealth 2 male (JP)
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