Title:
EXPOSURE DEVICE AND LIGHTING UNIT
Document Type and Number:
WIPO Patent Application WO/2015/001736
Kind Code:
A1
Abstract:
The present invention pertains to an exposure device, etc., for subjecting a substrate to exposure by forming the image of a mask pattern on the substrate using a micro-lens array, and reduces the size of a lighting unit for emitting exposure light. A micro-lens array (30) has a plurality of micro-lenses (31) two-dimensionally disposed including an array in a direction intersecting a movement direction (A). The lighting unit has: an LD array bar in which a plurality of laser diodes are arranged; and a lighting optical system for converting a plurality of light emitted from the plurality of laser diodes constituting the LD array bar into a slit-shaped beam of exposure light which, for the direction intersecting the movement direction (A), spreads across the plurality of micro-lenses (31) arranged in that direction and which, for the movement direction (A), is limited to an expanse not reaching the micro-lenses (31) arranged in a row adjacent to that movement direction, and irradiating the plurality of micro-lenses (31) arranged in one row with an exposure light (170) constituted by the converted beam of exposure light.
Inventors:
KAJIMAYA KOICHI (JP)
MIZUMURA MICHINOBU (JP)
HATANAKA MAKOTO (JP)
MIZUMURA MICHINOBU (JP)
HATANAKA MAKOTO (JP)
Application Number:
PCT/JP2014/003213
Publication Date:
January 08, 2015
Filing Date:
June 16, 2014
Export Citation:
Assignee:
V TECHNOLOGY CO LTD (JP)
International Classes:
G03F7/20; H01L21/027
Foreign References:
JP2013098432A | 2013-05-20 | |||
JP2012220592A | 2012-11-12 | |||
JP2009277900A | 2009-11-26 | |||
JP2009229721A | 2009-10-08 | |||
JP2008152039A | 2008-07-03 | |||
JP2004039871A | 2004-02-05 | |||
JP2002373448A | 2002-12-26 |
Attorney, Agent or Firm:
YAMADA, Masaki et al. (JP)
Masanori Yamada (JP)
Masanori Yamada (JP)
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