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Patent Searching and Data


Title:
EXPOSURE DEVICE, MOBILE DEVICE, AND DEVICE MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2014/080957
Kind Code:
A1
Abstract:
A stage drive system (124), which is a magnetic levitation-type planar motor, is controlled according to measurement results of an encoder system so as to perform drive control of a wafer stage (WST), and if an abnormality in the drive control of the wafer stage (WST) is detected, the stage drive system (124) is controlled so as to apply thrust to the wafer stage (WST) in the vertical direction. Thus, chipping of the wafer stage (WST) can be avoided, and damage to the wafer stage (WST) (in particular, a scale disposed on top of the stage) and a structure (in particular, an encoder head etc.) positioned directly above the wafer stage can be prevented.

Inventors:
MIYAKAWA, Tomoki (12-1 Yurakucho 1-chome, Chiyoda-k, Tokyo 31, 〒1008331, JP)
Application Number:
JP2013/081323
Publication Date:
May 30, 2014
Filing Date:
November 20, 2013
Export Citation:
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Assignee:
NIKON CORPORATION (12-1, Yurakucho 1-chome Chiyoda-k, Tokyo 31, 〒1008331, JP)
International Classes:
H01L21/027; G03F7/20; G05D3/00; H01L21/68
Domestic Patent References:
WO1999049504A11999-09-30
Foreign References:
JP2011211181A2011-10-20
JP2011160001A2011-08-18
JP2010050291A2010-03-04
JP2009021590A2009-01-29
JP2005045164A2005-02-17
JP2002057099A2002-02-22
JPH1064809A1998-03-06
JPH06274230A1994-09-30
US6445093B12002-09-03
US6452292B12002-09-17
US20080088843A12008-04-17
US5196745A1993-03-23
US20030025890A12003-02-06
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US7023610B22006-04-04
US6778257B22004-08-17
US6611316B22003-08-26
Other References:
See also references of EP 2947679A4
Attorney, Agent or Firm:
TATEISHI, Atsuji (TATEISHI & CO, Karakida Center Bldg. 1-53-9, Karakida, Tama-sh, Tokyo 35, 〒2060035, JP)
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