Title:
EXPOSURE DEVICE
Document Type and Number:
WIPO Patent Application WO/2016/104271
Kind Code:
A1
Abstract:
An exposure device (1) photoirradiation unit (10) provided above a stage (21) on which an object (W) to be exposed is placed, and having a rod-shaped light source (11) detachably provided thereon, wherein during exposure, the photoirradiation unit (10) is positioned in a manner such that the lengthwise direction of the light source (11) is perpendicular to the scanning direction of the object (W) to be exposed, and when exchanging the light source (11), the photoirradiation unit (10) is rotated by substantially 45 degrees or more relative to the position thereof during exposure. As a result, it is possible to effectively use the space outside the exposure device (1).
Inventors:
HASHIMOTO KAZUSHIGE (JP)
ARAI TOSHINARI (JP)
ARAI TOSHINARI (JP)
Application Number:
PCT/JP2015/085179
Publication Date:
June 30, 2016
Filing Date:
December 16, 2015
Export Citation:
Assignee:
V TECHNOLOGY CO LTD (JP)
International Classes:
G03F7/20; G02F1/13; G02F1/1337; H01L21/027
Foreign References:
| JP2014013277A | 2014-01-23 | |||
| JP2002367874A | 2002-12-20 | |||
| JP2006133498A | 2006-05-25 | |||
| JP2013182085A | 2013-09-12 |
Attorney, Agent or Firm:
SAKATA Yukari (JP)
Sakata Connection (JP)
Sakata Connection (JP)
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