Title:
EXPOSURE DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/021651
Kind Code:
A1
Abstract:
[Problem] To provide an exposure device comprising light irradiation devices in which the interior of lens barrels is provided with short-arc flash lamps and converging mirrors that reflect the light from the lamps, and in which light irradiation windows are provided at the bottom of the lens barrels, wherein the size of the irradiation area is increased while preserving uniformity of illuminance distribution. [Solution] The present invention is characterized in that an optical system that parallelizes the light reflected from the converging mirrors is provided inside the lens barrels, the optical system comprises a plurality of lens members disposed in a straight line along the same light axis between the lamps and the light irradiation windows, the light irradiation devices are provided in plurality, a mask stage and a workpiece stage that are conveyed in an integrated manner are disposed below the plurality of light irradiation devices, those among the plurality of light irradiation devices that are adjacent as viewed from the conveying direction are disposed in a positional relationship such that some of the light irradiation windows overlap in the conveying direction, and effective irradiation regions are formed in which the cumulative light amounts are equivalent as viewed from the conveying direction.
Inventors:
HOSOYA SHIGEHARU (JP)
Application Number:
PCT/JP2018/022089
Publication Date:
January 31, 2019
Filing Date:
June 08, 2018
Export Citation:
Assignee:
USHIO ELECTRIC INC (JP)
International Classes:
G03F7/20; G02B7/02; G02B21/16
Domestic Patent References:
| WO2009093553A1 | 2009-07-30 |
Foreign References:
| JP2015126044A | 2015-07-06 | |||
| JP2014235965A | 2014-12-15 | |||
| JP2011119594A | 2011-06-16 | |||
| JPH10199800A | 1998-07-31 |
Attorney, Agent or Firm:
ISOHATA Masao (JP)
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