EXPOSURE EQUIPMENT

WIPO Patent Application WO/2012/070651

A1

[Problem] To provide exposure equipment capable of preventing speckle from standing out in an optical image formed on a photosensitive medium, and effectively suppressing the occurrence of unevenness in the brightness within a prescribed region. [Solution] The exposure equipment (10) is provided with an optical element (50), a lighting device (60), and a spatial light modulator (30). Using a scanning device (65), coherent light is scanned across a hologram recording medium (55), and the coherent light coming from the hologram recording medium (55) irradiates the spatial light modulator (30), which overlaps with a prescribed region (LZ). In addition, a photosensitive medium (15) is positioned adjacent to the spatial light modulator (30); hence, using a very simple configuration, it is possible to guide coherent light to the photosensitive medium (15) without causing speckle to stand out.

ISHIDA KAZUTOSHI (JP)
KURASHIGE MAKIO (JP)
TAKANOKURA TOMOE (JP)
OOYAGI YASUYUKI (JP)

PCT/JP2011/077216

May 31, 2012

November 25, 2011

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DAINIPPON PRINTING CO LTD (JP)
ISHIDA KAZUTOSHI (JP)
KURASHIGE MAKIO (JP)
TAKANOKURA TOMOE (JP)
OOYAGI YASUYUKI (JP)

H01L21/027; G02B19/00; G02B26/10

JPH01220825A	1989-09-04
JP2008085266A	2008-04-10
JP2000277421A	2000-10-06
JP2010197916A	2010-09-09
JPH096011A	1997-01-10
JPH07142354A	1995-06-02
JPH06208089A	1994-07-26

JOSEPH W. GOODMAN: "Speckle Phenomena in Optics", 2006, ROBERTS & CO.
See also references of EP 2645404A4

KATSUNUMA Hirohito et al. (JP)
Katsunuma Hirohito (JP)

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