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Patent Searching and Data


Title:
EXTENSION OF PVD CHAMBER WITH MULTIPLE REACTION GASES, HIGH BIAS POWER, AND HIGH POWER IMPULSE SOURCE FOR DEPOSITION, IMPLANTATION, AND TREATMENT
Document Type and Number:
WIPO Patent Application WO/2018/140193
Kind Code:
A3
Abstract:
Embodiments of the present disclosure provide a sputtering chamber with in-situ ion implantation capability. In one embodiment, the sputtering chamber comprises a target, an RF and a DC power supplies coupled to the target, a support body comprising a flat substrate receiving surface, a bias power source coupled to the support body, a pulse controller coupled to the bias power source, wherein the pulse controller applies a pulse control signal to the bias power source such that the bias power is delivered either in a regular pulsed mode having a pulse duration of about 100-200 microseconds and a pulse repetition frequency of about 1-200 Hz, or a high frequency pulsed mode having a pulse duration of about 100-300 microseconds and a pulse repetition frequency of about 200 Hz to about 20 KHz, and an exhaust assembly having a concentric pumping port formed through a bottom of the processing chamber.

Inventors:
LIU, Jingjing (1812 Lee Way, Milpitas, California, 95035, US)
GODET, Ludovic (299W Washington Ave, Sunnyvale, California, 94086, US)
NEMANI, Srinivas D. (504 Fern Ridge Court, Sunnyvale, California, 94087, US)
CHEN, Yongmei (1438 Stone Creek Drive, San Jose, California, 95132, US)
SUBRAMANI, Anantha K. (4245 Merlot Court, San Jose, California, 95135, US)
Application Number:
US2017/069033
Publication Date:
September 20, 2018
Filing Date:
December 29, 2017
Export Citation:
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Assignee:
APPLIED MATERIALS, INC. (3050 Bowers Avenue, Santa Clara, California, 95054, US)
International Classes:
C23C14/34; C23C14/35; C23C14/48; C23C14/54; H01J37/34; H01L21/02; H01L21/67
Domestic Patent References:
WO2012036936A22012-03-22
Foreign References:
US20050136656A12005-06-23
US20020068464A12002-06-06
US5830330A1998-11-03
US6117279A2000-09-12
US20100252417A12010-10-07
Attorney, Agent or Firm:
PATTERSON, B. Todd et al. (PATTERSON & SHERIDAN, L.L.P.24 Greenway Plaza, Suite 160, Houston Texas, 77046, US)
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