Title:
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS, AND METHOD FOR CONTROLLING GRAVITY CENTER POSITION OF EXTREME ULTRAVIOLET LIGHT
Document Type and Number:
WIPO Patent Application WO/2017/163345
Kind Code:
A1
Abstract:
This extreme ultraviolet light generation apparatus is provided with: a plurality of EUV light sensors that measures, from different directions, the energy of an extreme ultraviolet light generated by irradiating a target supplied to a prescribed region in a chamber with a laser beam; an emitted position adjustment unit that adjusts the emitted position of the laser beam with respect to a target supplied to the prescribed region; and a control unit that controls the emitted position adjustment unit so that the gravity center position of the extreme ultraviolet light specified from the measurement result of the EUV light sensors matches a target gravity center. The control unit controls the emitted position adjustment unit so as to scan the emitted position according to a plurality of scanning levels of different positions, and calibrates the target gravity center positon on the basis of a measurement result acquired at each of the scanning levels.
Inventors:
NISHIMURA YUICHI (JP)
YABU TAKAYUKI (JP)
YABU TAKAYUKI (JP)
Application Number:
PCT/JP2016/059236
Publication Date:
September 28, 2017
Filing Date:
March 23, 2016
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
H05G2/00
Foreign References:
| JP2015524599A | 2015-08-24 | |||
| JP2007109451A | 2007-04-26 | |||
| JP2014531743A | 2014-11-27 | |||
| US8598552B1 | 2013-12-03 |
Attorney, Agent or Firm:
YANAGIDA Masashi et al. (JP)
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