Title:
EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/042881
Kind Code:
A1
Abstract:
This extreme ultraviolet light generation device may be provided with: a chamber having a window through which pulse laser light is inputted; a target supply unit that outputs at least one target toward a predetermined region inside of the chamber; a target image pickup device that picks up an image of at least one target; a first actuator that changes the position of the image pickup to be performed by the target image pickup device; and a control unit that controls the first actuator on the basis of a signal transmitted from the outside.
Inventors:
HOSODA HIROKAZU (JP)
SUZUKI TORU (JP)
SUZUKI TORU (JP)
Application Number:
PCT/JP2015/075465
Publication Date:
March 16, 2017
Filing Date:
September 08, 2015
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
H05G2/00
Domestic Patent References:
| WO2015041260A1 | 2015-03-26 |
Foreign References:
| JP2013166266A | 2013-08-29 | |||
| JP2009195310A | 2009-09-03 |
Attorney, Agent or Firm:
HOSAKA Nobuhisa (JP)
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