Title:
EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/090167
Kind Code:
A1
Abstract:
Provided is an extreme ultraviolet light generation device that may comprise the following: a target supply unit for outputting a target; a drive laser for outputting drive laser light with which the target is irradiated; a guide laser for outputting guide laser light; a beam combiner for substantially matching and outputting an optical path of the drive laser light outputted from the drive laser and an optical path of the guide laser light that is outputted from the guide laser; a first optical element provided with a first actuator for adjusting the optical path of the drive laser light that is incident on the beam combiner; a second optical element provided with a second actuator for adjusting the optical path of the guide laser light that is incident on the beam combiner; a sensor for detecting the guide laser light outputted from the beam combiner and outputting detection data; and a control unit for receiving the detection data on the guide laser light from the sensor, controlling the second actuator on the basis of the detection data, and controlling the first actuator on the basis of a control quantity of the second actuator.
Inventors:
YABU TAKAYUKI (JP)
NISHIMURA YUICHI (JP)
NISHIMURA YUICHI (JP)
Application Number:
PCT/JP2015/083299
Publication Date:
June 01, 2017
Filing Date:
November 26, 2015
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
H05G2/00
Domestic Patent References:
| WO2014097811A1 | 2014-06-26 |
Foreign References:
| JP2013535824A | 2013-09-12 | |||
| JP2014531743A | 2014-11-27 |
Attorney, Agent or Firm:
HOSAKA Nobuhisa (JP)
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