Title:
EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/145366
Kind Code:
A1
Abstract:
An extreme ultraviolet light generation device of the present invention is provided with: a target supply unit that outputs, along a track, a plurality of targets toward a plasma generation region; a laser device that outputs laser light toward the plasma generation region; an image pickup unit, which has the image pickup direction non-orthogonal and non-parallel to the target, picks up an image of a region including the plasma generation region, and outputs image data; an illuminating unit that outputs illuminating light to the region including the plasma generation region; an image pickup position changing unit that changes, in the image pickup direction, the image pickup position of the image pickup unit; a moving amount determining unit that determines the moving amount of the image pickup position on the basis of the image data; and a control unit that controls the image pickup position changing unit on the basis of the moving amount thus determined by the moving amount determining unit.
Inventors:
SUZUKI TORU (JP)
Application Number:
PCT/JP2016/055854
Publication Date:
August 31, 2017
Filing Date:
February 26, 2016
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
G03F7/20; H05G2/00
Domestic Patent References:
| WO2015041260A1 | 2015-03-26 |
Foreign References:
| JP2014086523A | 2014-05-12 | |||
| JP2008532286A | 2008-08-14 |
Attorney, Agent or Firm:
KYORITSU INSTITUTE (JP)
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