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Title:
EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE AND METHOD FOR CONTROLLING EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/208340
Kind Code:
A1
Abstract:
An extreme ultraviolet light generation device is provided with a laser device (20) that emits pulsed laser light, a target detection device that detects a target substance supplied in a chamber as an irradiation target of the laser light, and a controller (200) that controls the laser device on the basis of a burst signal in which a burst period, during which the extreme ultraviolet light is to be generated, alternates with a pause period, during which generation of the extreme ultraviolet light is paused. The controller (200) may limit the intensity of the laser light entering from the laser device into the chamber during the burst period if the size of the target substance detected by the target detection device during the pause period is greater than a stipulated size.

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Inventors:
TAKASHIMA Yuta (400 Oaza Yokokurashinden, Oyama-sh, Tochigi 58, 〒3238558, JP)
UENO Yoshifumi (400 Oaza Yokokurashinden, Oyama-sh, Tochigi 58, 〒3238558, JP)
SHIROZU Go (400 Oaza Yokokurashinden, Oyama-sh, Tochigi 58, 〒3238558, JP)
Application Number:
JP2016/066017
Publication Date:
December 07, 2017
Filing Date:
May 31, 2016
Export Citation:
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Assignee:
GIGAPHOTON INC. (400 Oaza Yokokurashinden, Oyama-shi Tochigi, 58, 〒3238558, JP)
International Classes:
H05G2/00
Attorney, Agent or Firm:
MORIMURA Yasuo (Akihabara Hanaoka Building 6F, 10-9 Iwamotocho 3-chome, Chiyoda-k, Tokyo 32, 〒1010032, JP)
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