Title:
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
Document Type and Number:
WIPO Patent Application WO/2018/131123
Kind Code:
A1
Abstract:
Provided is an extreme ultraviolet light generation system comprising: a target supplying unit that outputs a target toward a prescribed region; a drive laser that outputs drive laser light during a period in which a burst signal input from an external device is in a first state; guide lasers that output guide laser light; a beam combiner that outputs the drive laser light output from the drive laser and the guide laser light output from the guide lasers so that the optical path axes thereof are substantially coincident; a laser light condensing optical system that condenses, in a prescribed region, the drive laser light and the guide laser light output from the beam combiner; an actuator that changes the position at which the drive laser light and the guide laser light are condensed by the laser light condensing optical system; an optical sensor that detects reflected light which is the guide laser light reflected by the target; and a control unit that, during a period in which the burst signal is in a second state different from the first state, controls the actuator so that the volume of reflected light detected by the optical sensors becomes higher.
Inventors:
YABU TAKAYUKI (JP)
WAKABAYASHI OSAMU (JP)
WAKABAYASHI OSAMU (JP)
Application Number:
PCT/JP2017/000845
Publication Date:
July 19, 2018
Filing Date:
January 12, 2017
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
G03F7/20; H05G2/00
Foreign References:
| JP2012178534A | 2012-09-13 | |||
| JP2013105725A | 2013-05-30 | |||
| JP2012199512A | 2012-10-18 | |||
| JP2014531743A | 2014-11-27 | |||
| JP2013513929A | 2013-04-22 |
Attorney, Agent or Firm:
HOSAKA Nobuhisa (JP)
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