Title:
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
Document Type and Number:
WIPO Patent Application WO/2018/131146
Kind Code:
A1
Abstract:
This extreme ultraviolet light generation system is provided with: a target supply unit; a prepulse laser that outputs prepulse laser light; a main pulse laser that outputs main pulse laser light; a light collecting optical system that collects the prepulse laser light and the main pulse laser light to a predetermined region; an actuator that changes the position to which the prepulse laser light is to be collected by means of the light collecting optical system; a first sensor which, after the prepulse laser light is irradiated, picks up an image of a target before the main pulse laser light is irradiated; and a control unit, which stores the reference position of the actuator, and which, after the prepulse laser light is irradiated, calculates predetermined parameters on the basis of image data acquired from the first sensor, said predetermined parameters relating to the target not having been irradiated with the main pulse laser light, and which, in the cases where the predetermined parameters do not meet first conditions, controls the actuator so that the actuator is close to the reference position.
Inventors:
NISHIMURA YUICHI (JP)
YABU TAKAYUKI (JP)
UENO YOSHIFUMI (JP)
YABU TAKAYUKI (JP)
UENO YOSHIFUMI (JP)
Application Number:
PCT/JP2017/001106
Publication Date:
July 19, 2018
Filing Date:
January 13, 2017
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
H05G2/00; G03F7/20
Foreign References:
| JP2014531743A | 2014-11-27 | |||
| JP2012199512A | 2012-10-18 | |||
| JP2010123942A | 2010-06-03 | |||
| JP2008532232A | 2008-08-14 | |||
| JP2006032578A | 2006-02-02 |
Attorney, Agent or Firm:
HOSAKA Nobuhisa (JP)
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